PECVD SiNx passivation for AlGaN/GaN HFETs with ultra-thin AlGaN barri…
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ISSN:
| 0038-1101 |
Vol.
| 173 |
pp.
107876-107876
- 이전글P-GaN Gated AlGaN/GaN E-mode HFET Fabricated with Selective GaN Etching Process 21.04.19
- 다음글Improved Stability of AlGaN/GaN Heterojunction Schottky-Diode-Type Hydrogen Sensor Using Constant Current Source Operation 21.04.19
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